A Hydrogenated Amorphous Silicon (a-Si:H) Thin Films for Heterojunction Solar Cells: Structural and Optical Properties

Abstract

Heterojunction solar cells composed of hydrogenated amorphous silicon (a-Si:H) and c-Si has been widely studied due to its excellent photovoltaic characteristics. In this study, we studied the structural and optical properties of a-Si:H thin films for heterojunction solar cells by using SEM, TEM and ellipsometry. We found that uniform deposition of a-Si:H thin film on substrate is crucial to reach high solar cell efficiencies. © Published under licence by IOP Publishing Ltd.